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Well, That’s It. Read More To Know More About Us, Click on The Following link : Welcome To keloidResearch.comThe present invention relates to a method of forming an impurity prevention film for preventing an impurity atom from attaching to an interface between the impurity atom and a chip.
In a semiconductor device, to suppress a latch-up phenomenon or a soft error, it is essential that no impurity atom attaches to a junction.
There are considered two methods for preventing an impurity atom from attaching.
The first method is to arrange a built-in diffusion source so as to cover the junction. This method is effective when it is not possible to apply a boron nitride (BN) film because of the presence of a thick gate oxide, etc. In this case, however, the diffusion source is formed of a conductor. A buried diffusion source is formed only in the inside of an insulating film.
The second method is to prevent a boundary between semiconductors from having an impurity atom, by forming a silicon nitride film (SiNx) on a semiconductor substrate.
In general, the first method is applied to an NMOS (n-channel MOS) transistor, while the second method is applied to a CMOS (complementary MOS) circuit.
In order to prevent an impurity atom from attaching to the junction, it is important to interpose a buffer layer or semiconductor between the junction and an external electrode.
As a method of forming the buffer layer or semiconductor, the following methods are known:
1) A method of forming a silicon oxide (SiO2) film by a CVD (Chemical Vapor Deposition) process.
2) A method of forming a silicon nitride film by a CVD process, etc.
3) A method of forming a silicon oxide film by a PVD (Physical Vapor Deposition) process.
When a silicon nitride film is used, it is possible to decrease the impurity concentration and provide a buffer layer or semiconductor. It is however difficult to make the thickness of the silicon nitride film uniform. In the case of a thick film, the
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